Product Description:
TESTEQ Thermal Vacuum Cleaning System for High-Precision Semiconductor Components
Industry-Leading Contamination
Removal for Lithography, Optics & Wafer Processing
This equipment adopts an innovative inclined sealing structure (patented design-Thermal Vacuum/Lithography/UHV).
Through the gravity-adaptive cover plate and double-ring sealing ring interlocking technology, it can maintain a stable vacuum level (≤10⁻⁶ Pa), solving the problem of reduced cleaning efficiency caused by sealing failure in traditional equipment.
It integrates a dual-fluid spray system (sodium hydroxide + deionized water), supporting non-destructive cleaning in a high-temperature (350℃) vacuum environment, avoiding thermal stress deformation.
It is suitable for the maintenance of high-precision components such as mask plates, lens groups, and vacuum pump components of lithography machines, significantly improving chip yield and equipment lifespan.If you need more models about our test equipment, please reference our : chamber-testing
Company Contact:

Contact Name: Kiss
Company Name: Guangdong test eq equipment co., ltd.
Email:
Tel: 8613310826672
Fax:
Street Address: No. 5, Wenzhou Road,
Dongcheng Sub-district,
Dongguan city, Guangdong
Province 523000
China
Website:
https://www.chamber-testing.com/
Member name: testeq
Country:

China
Member Since: 01 September 2025
Total Leads:
26 testeq Import Export Business Leads
Business focus: Halt Hass Chamber, Altitude Chamber, Ess Chamber, Vibration Chamber, Thermal Vacuum Chamber, Thermal Shock Chamber
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