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Semiconductor Parts Drying Solutions For Asml / Nikon Parts

Posted at: Offers to Sell and Export | Posted on: Friday 10 October 2025 1:55 am | Poster last visit: Saturday 11 October 2025 |

Product Category: Main » Laboratory and Measuring and Observing and Testing Equipment » Laboratory and scientific equipment » Laboratory heating and drying equipment » Temperature cycling chambers or thermal cyclers » Semiconductor Parts Drying Solutions For Asml / Nikon Parts


Product Photo:

semiconductor drying solutions asml nikon

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Product Description:

Semiconductor parts drying solutions for asml/ nikon parts

Technical Specifications


✔ Vacuum

Range: 10⁻³ to 10⁻⁷ Pa (configurable for EUV, DUV, and advanced packaging)

✔ Temperature Range: 80°C to 450°C (precision-controlled for optics, metals, and coatings)

✔ Gas Purging System: N₂, Ar, H₂, or custom mixes (0.1–0.5 MPa, pulsed/continuous flow)

✔ Plasma-Assisted Cleaning (Optional): O₂, Ar plasma (50–300W) for organic/polymer removal

✔ Ultrasonic Enhancement (Optional): 40–80 kHz for particle dislodgement (low-pressure safe)

✔ Material Compatibility: Si/Mo mirrors, SiC, Al (≤200°C), stainless steel, ceramics

✔ Process Monitoring: Real-time RGA (Residual Gas Analysis) & particle detection

If you need more models about our test equipment, please reference our chamber-testing

Critical Applications

1. EUV Lithography Systems

Mirror & Collector Optics Cleaning – Eliminates Sn droplets and carbon buildup.

Reticle & Pellicle Maintenance – Ensures zero mask defects.

Vacuum Chamber Conditioning – Prevents contamination in EUV source modules.

2. DUV Lithography & Advanced Packaging

Lens & Prism Decontamination – Stops haze formation.

Wafer Chuck & Stage Recovery – Restores optimal electrostatic clamping.

3. R&D & Failure Analysis

Prototype Surface Prep – Clean surfaces for SEM, TEM, XPS analysis.



Company Contact:

testeq photo
Contact Name: Kiss
Company Name: Guangdong test eq equipment co.,  ltd.
Email: Email
Tel: 8613310826672
Fax:
Street Address: No. 5, Wenzhou Road,
\r\ndongcheng Sub-district,
Dongguan\r\ncity, , Guangdong
Province 523000\r\nchina
Other Contact Info:
Other Contact Info: 8613310826672
Website: https://www.chamber-testing.com/
Member name: testeq
Country: China-CN China
Member Since: 01 September 2025
Total Leads: 19 testeq Import Export Business Leads
Business focus: Halt Hass Chamber, Altitude Chamber, Ess Chamber, Vibration Chamber, Thermal Vacuum Chamber, Thermal Shock Chamber
Verify: Safe Import Export Tips



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