Product Description:
Semiconductor parts drying solutions for asml/ nikon parts
Technical Specifications
✔ Vacuum
Range: 10⁻³ to 10⁻⁷ Pa (configurable for EUV, DUV, and advanced packaging)
✔ Temperature Range: 80°C to 450°C (precision-controlled for optics, metals, and coatings)
✔ Gas Purging System: N₂, Ar, H₂, or custom mixes (0.1–0.5 MPa, pulsed/continuous flow)
✔ Plasma-Assisted Cleaning (Optional): O₂, Ar plasma (50–300W) for organic/polymer removal
✔ Ultrasonic Enhancement (Optional): 40–80 kHz for particle dislodgement (low-pressure safe)
✔ Material Compatibility: Si/Mo mirrors, SiC, Al (≤200°C), stainless steel, ceramics
✔ Process Monitoring: Real-time RGA (Residual Gas Analysis) & particle detection
If you need more models about our test equipment, please reference our chamber-testing
Critical Applications
1. EUV Lithography Systems
Mirror & Collector Optics Cleaning – Eliminates Sn droplets and carbon buildup.
Reticle & Pellicle Maintenance – Ensures zero mask defects.
Vacuum Chamber Conditioning – Prevents contamination in EUV source modules.
2. DUV Lithography & Advanced Packaging
Lens & Prism Decontamination – Stops haze formation.
Wafer Chuck & Stage Recovery – Restores optimal electrostatic clamping.
3. R&D & Failure Analysis
Prototype Surface Prep – Clean surfaces for SEM, TEM, XPS analysis.
Company Contact:

Contact Name: Kiss
Company Name: Guangdong test eq equipment co., ltd.
Email:
Tel: 8613310826672
Fax:
Street Address: No. 5, Wenzhou Road,
\r\ndongcheng Sub-district,
Dongguan\r\ncity, , Guangdong
Province 523000\r\nchina
Other Contact Info:
Other Contact Info: 8613310826672
Website:
https://www.chamber-testing.com/
Member name: testeq
Country:

China
Member Since: 01 September 2025
Total Leads:
19 testeq Import Export Business Leads
Business focus: Halt Hass Chamber, Altitude Chamber, Ess Chamber, Vibration Chamber, Thermal Vacuum Chamber, Thermal Shock Chamber
Verify:
Safe Import Export Tips