MeV He ion has been successfully applied to the preparation of LiNbO3 waveguide, but the formation of
the waveguide is generally multimode, compare the damage distribution in this case refraction no general use fitting rate distribution and simulated using SRIM. In this experiment, using 400 keV He ions at 77 K, dose of 3 × 1016 ions/cm2, single-mode planar waveguides formed LiNbO3 injection.
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