Magnesium doped lithium niobate (MgLiNbO3) is a relatively difficult to etch the crystal, dry etching
rate and the etching morphology of MgLiNbO3 control is one of the key technologies in the processing of the lithium niobate optoelectronic devices. Mg doped lithium niobate crystal has excellent electro-optic and nonlinear optical properties, also has the ability of resisting laser damage high, mechanical and chemical properties, through the wide range, easy to grow into the advantages of large size crystals, has unique advantages in the quasi phase matching, optical waveguide and optical applications.
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